Abstract:At present, computer simulation has become an important researching tool for thin film growth as one of theory method, which can be used to understand the mechanism of thin film growth at atom level. Now, most of simulations about thin film growth are about two dimensional and the object of simulation is only one kind of atom, such as Cu, Al, or Si on different substrate, and the work about simulation of oxide thin film growth is much less. However, many oxide thin films are playing very important role in electronic application because of their unique properties as functional materials, so it need to better understand the growth kinetics of oxide thin films. A new model for simulation of the growth of PbTiO3 (abbreviated as PTO) thin film basing on kinetic Monte Carlo method has been developed in this paper. A pack of simulation software for PTO was developed. From the simulation it is obtained that the deposition rate and the substrate temperature play a very important role in the initial process of growth of PTO thin film, and with the rising of the substrate temperature and the decreasing of deposition rate, the size of the initial nucleuses gets larger and the number of them in unit area gets less. And with advance of modern instrument, it's possible to get the morphology of ABO(3) structure thin films at its initial stage of growth by STM to test and improve our model. The related experimental work is at hands.

The Algorithm of Monte Carlo Growth Simulation of Pbtio3 Thin Film

Monte Carlo Simulation Of Growth Of Pbtio3 Oxide Thin Films

Simulation of the Growth of PbTiO3 Thin Film by Monte Carlo Method Ⅰ:model and Algorithm

Simulation of the Growth of PbTiO_3 Thin Film by Monte Carlo Method II:results and Discussion

Simulation of the homo-eptiaxial growth of (Ba, Sr)TiO3 thin films

The Growth Simulation of Ti Thin Film Onto Si Substrate

Application of Computer: Monte Carlo Simulation of Thin Film Growth

Monte Carlo simulation of the growth of SrTiO3 thin film with molecular source

Preparation of Nano-Structured BaTiO3 Thin Film by Electrophoretic Deposition and Its Characterization

ICOPE-15-C076 Cu_2ZnSnS_4 (CZTS) Thin Film Morphology Evolution and Growth Mechanism : 3D Kinetic Monte Carlo Simulation

A Computer Simulation of Nucleation and Growth of Thin Films

Progress of Monte-Carlo Simulation of the Growth of Thin Films by Physical Vapor Deposited

Kinetic Lattice Monte Carlo Simulation of Cu Thin Film Growth

RESEARCHES ON THE GROWTH BEHAVIOR OF PbTiO3 THIN FILMS AT THEIR INITIAL STAGES

Simulation of the hetero-eptiaxial growth of oxide thin films

MONTE CARLO SIMULATION OF THIN FILMS GROWTH

Single-Crystalline, Single-Domain Epitaxy of Pbtio3 Thin-Films by Metalorganic Chemical-Vapor-Deposition

Monte Carlo Simulation of Growth of Binary Bcc Structured Layers

(Ba,sr)tio3 Thin Film Growth in A Batch Processing Mocvd Reactor

THE GROWTH SIMULATION OF ABO3 TYPE EPITAXIAL THIN FILMS

Computer simulation of grain growth of intermediate—and final-stage sintering and Ostwald ripening of BaTiO3-based PTCR ceramics