Abstract:At present, computer simulation has become an important researching tool for thin film growth as one of theory method, which can be used to understand the mechanism of thin film growth at atom level. Now, most of simulations about thin film growth are about two dimensional and the object of simulation is only one kind of atom, such as Cu, Al, or Si on different substrate, and the work about simulation of oxide thin film growth is much less. However, many oxide thin films are playing very important role in electronic application because of their unique properties as functional materials, so it need to better understand the growth kinetics of oxide thin films. A new model for simulation of the growth of PbTiO3 (abbreviated as PTO) thin film basing on kinetic Monte Carlo method has been developed in this paper. A pack of simulation software for PTO was developed. From the simulation it is obtained that the deposition rate and the substrate temperature play a very important role in the initial process of growth of PTO thin film, and with the rising of the substrate temperature and the decreasing of deposition rate, the size of the initial nucleuses gets larger and the number of them in unit area gets less. And with advance of modern instrument, it's possible to get the morphology of ABO(3) structure thin films at its initial stage of growth by STM to test and improve our model. The related experimental work is at hands.

Simulation of the hetero-eptiaxial growth of oxide thin films

Simulation of the homo-eptiaxial growth of (Ba, Sr)TiO3 thin films

Monte Carlo simulation of the growth of SrTiO3 thin film with molecular source

Growth of Cubic MgxZn1-xO Films and Characterization

The Growth Simulation of Ti Thin Film Onto Si Substrate

Computer Simulations of the Stranski–Krastanov Growth of Heteroepitaxial Films with Elastic Anisotropy

Monte Carlo Simulation Of Growth Of Pbtio3 Oxide Thin Films

Growth Dynamics Controllable Deposition of Homoepitaxial MgO Films on the IBAD-MgO Substrates

Simulation of the Growth of PbTiO3 Thin Film by Monte Carlo Method Ⅰ:model and Algorithm

Epitaxial growth and stress analysis of Zn1-xMgxO films on (111) Si substrates

The Study of Composition Non-Uniformity in Ternary Mgxzn1-Xo Thin Films

Study on Interfacial Strain Behavior of Functional Oxide Heterostructures

Heteroepitaxial Growth of MgO Films by Dual Ion Beam Sputtering

Effects of Compressive and Tensile Stress on the Growth Mode of Epitaxial Oxide Films

Monte Carlo Simulation of Epitaxial Growth on Semiconductor Film Material

Epitaxial Growth of Cubic Mg0.45Zn0.55O Thin Films on SrTiO3 (001) Substrate with MgO Buffer Layer

Simulation of the Growth of PbTiO_3 Thin Film by Monte Carlo Method II:results and Discussion

Microstructure Evolution of Homoepitaxial MgO Layer and the Effect on the Growth Mode of CeO2 Film

Molecular Dynamics Simulations of La2O3 Thin Films on SiO2

Simulation of Si Film Growth on Si(100)-(2×1) Surface

THE GROWTH SIMULATION OF ABO3 TYPE EPITAXIAL THIN FILMS