Size dependent mechanical properties of nanocrystalline Cu films

Zheng-Hua Cao,Ping-Yun Li,Hai-Ming Lu,Xiang-Kang Meng
DOI: https://doi.org/10.3321/j.issn:0469-5097.2009.02.013
2009-01-01
Abstract:The mechanical properties of Cu films with different thickness have been investigated by nanoindentation tests.The relation between the hardness and thickness exhibits Hall-Petch-like behavior,whereas elastic modulus is independent on thickness and it is about 20% less than that of conventional coarse-grained Cu.The critical shear stress of Cu films with different thickness is close to the theoretical shear stress of conventional coarse-grained Cu.The present results are explained by indentation size effect and dislocation pile-up deformation mechanism for all Cu films with different thickness.
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