The Rate Sensitivity and Plastic Deformation of Nanocrystalline Tantalum Films at Nanoscale

Zhenhua Cao,Qianwei She,Yongli Huang,Xiangkang Meng
DOI: https://doi.org/10.1186/1556-276x-6-186
2011-01-01
Nanoscale Research Letters
Abstract:Nanoindentation creep and loading rate change tests were employed to examine the rate sensitivity (m) and hardness of nanocrystalline tetragonal Ta films. Experimental results suggested that the m increased with the decrease of feature scale, such as grain size and indent depth. The magnitude of m is much less than the corresponding grain boundary (GB) sliding deformation with m of 0.5. Hardness softening behavior was observed for smaller grain size, which supports the GB sliding mechanism. The rate-controlling deformation was interpreted by the GB-mediated processes involving atomic diffusion and the generation of dislocation at GB.
What problem does this paper attempt to address?