Inhomogeneous Etching of Bulk Metallic Glass Samples During Ion Milling

DENG Jing-wei,WU Bo,SUI Man-ling
DOI: https://doi.org/10.3969/j.issn.1000-6281.2012.03.001
2012-01-01
Abstract:Thickness variation in bulk metallic glass(BMG) specimens prepared by ion milling was studied by transmission electron microscopy(TEM) and atomic force microscopy(AFM).High resolution TEM and X-ray energy dispersive spectrometry results indicate no significant structure or composition changes in the specimens.The formation of these thickness patterns was interpretted by a roughening mechanism duing ion milling.The understanding of this inhomogeneous etching in BMG specimens during ion milling will help to achieve reliable BMG specimen preparation,which is critical for TEM study on BMG materials.
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