Design of a Large Aperture High-Precision Four-Dimensional Adjustment Table

ZHANG Chupeng,ZHAO Zexiang,ZHAO Huiying,YU Hechun,ZHANG Guoqing,WANG Wenbo
DOI: https://doi.org/10.3969/j.issn.1005-2402.2013.06.034
2013-01-01
Abstract:A SWTZT-1400 high-precision four-dimensional adjustment table was developed to solve the aligning and leveling problem during the manufacturing and measurement process of large aperture high-precision optical components. Based on the coordinate transformation in four-dimensional adjustment process, the design and the principle explanation of the high-precision four-dimensional table are discussed in this paper. For realizing high efficiency, high precision and high stability of table′s adjustment, the double level structure is adopted in the table, and eight point bearing and locking mechanism are used for leveling and high stability, respectively. The diameter and flatness of the top table of the four-dimensional adjustment table are 1 400 mm and 0.01 mm, respectively. The aligning and leveling ranges of the table are ±25 mm and ±3° in x direction and y direction, respectively. The aligning and leveling error of the table are 0.1 μm and 10″ in x direction and y direction. The accurate adjustment for position and angle of the installation optical components during the manufacturing, measurement and precision repairing of large aperture high-precision optical components may be realized for improving the manufacturing and measuring accuracy of the optical components.
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