Development of Ultra-Precision Machine for Large-Sized Mirror Surface

李勇,张向阳,谢晓丹

DOI: https://doi.org/10.3969/j.issn.1672-6030.2010.05.009

2010-01-01

Nanotechnology and Precision Engineering

Abstract:An ultra precision machine for mirror surface with the maximum workpiece diameter of φ880 mm was designed and manufactured,which had massive granite base,four axes CNC,aerostatic bearings and direct drive motors,and was able to process spherical,aspheric and freeform optical surfaces with ultra-high accuracy.The configuration features and performance parameters of the machine were presented,and the key technologies including aerostatic-bearing motorized spindle,linear aerostatic slideways and direct drive rotary table were described.Result shows that the rotation error of spindle is 0.05 μm,positional feedback resolution of slideways is 1.25 nm,and angular feedback resolution of the rotary table is 0.009″.In the cutting experiments,a spherical surface with roughness of 5 nm,profile accuracy of 0.5 μm,and diameter of φ400 mm was obtained on duralumin alloy,and an aspheric surface with roughness of 8 nm and profile accuracy of 0.5 μm/φ100 mm was gained on oxygen-free copper.