Development of the large diameter high precision hydrostatic rotary table

Yuanyuan WU,Bin LI,Huiying ZHAO
DOI: https://doi.org/10.19287/j.cnki.1005-2402.2017.05.016
2017-01-01
Abstract:large and high precision hydrostatic rotary table for the large aspheric mirror ultra precision NC grinding machine was present by this paper.Through the specimen manufacture feasibility and accuracy transformation model,the optimized structure of the rotary table was proposed.Design parameters of the oil gap size and stiffness was verified according to the discrete value list method.In order to investigate the effects of the high pressure oil towards the table deformation,fluid solid coupling method was used to verify the specimen's strength.40mm diameter standard sphere of 0.05 μm runout error was used to test the radial and axial runout value of the developed hydrostatic rotary table,the measurement indicated that both the radial and axial runout is less than 0.5 μm.
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