Abstract:The paper presents the design of a six-axis machining system and its application in fabricating large off-axis aspherical mirrors with sub-aperture lapping techniques. The new system is based on computer-controlled optical surfacing (CCOS), which combines the faculties of grinding, polishing, and on-machine profile measuring, has the features of conventional loose abrasive machining with the characteristics of a tool having multiple degrees of freedom moving in planar model. And a novel dual touch-trigger probe profiler is designed, which is composed of a probe, model METRO-MT60 made by HEIDENHAIN Co., is integrated into the system for measuring the shape accuracy of the tested aspherical surface, another probe modeled METRO-MT12 is designed as a calibrating device for minimizing the cosine error caused by assembly inaccuracy. The new CNC machining system with two kinds of moving coordinate systems, dual tool activities and on-machine measuring is presently developed based on the new concept. The general material removal function during machining is analyzed on the basis of the Preston hypothesis. Further, an alignment test of the measuring profiler is carried out using a leveling rule as a specimen. The accuracy of the optical surfaces measured by the dual probe profiler is found to be within 1μm PV after removing cosine error and error compensating, achieves to the resolving power of the profiler is about 0.2–0.5μm, so the developed system can be applied to the shape accuracy measuring of aspheric fabrication with micro precision during fine grinding process according to the calibrating results. Finally, the manufacturing experiments are carried out by virtue of an off-axis oblate ellipsoid mirror with rectangular aperture as 770mm×210mm and centered 127mm. The accuracy of the aspherical mirror improved from the initial form error of 17.648μmrms to the final one of 0.728μmrms after grinding for 200h.

Research on Precision Grinding Processing and Compensation Finishing Experiment for Mid-Large- Aperture Square Aspheric Optical Element

Development of Ultra-Precision Grinding Process for Aspheric Surface Based on Feed Rate Controlling and Error Compensation Methods

Ultra-precision Single-point Grinding Technique and Profile Error Compensation Method for Machining Aspheric Mould

One-Point Nano-Grinding for Micro-Aspherical Glass Lens Mould

Experimental Study on Precision Molding of Small Dual Aspherical Chalcogenide Glass Lens

Error Compensation in One-Point Inclined-Axis Nanogrinding Mode for Small Aspheric Mould

Discussions on On-Machine Measurement of Aspheric Lens-Mold Surface

An on-line measuring technique for lapping large aspherical mirror

Fabrication of Microglass Lens Mould by Using Ultraprecision Microgrinding Process

Research on Two Optical Methods for Aspheric Measurement

Nano-Precision Synergistic Finishing Process Integrated ELID-Grinding and MRF

The wavefront aberration analysis and testing accuracy evaluation for the large aberration aspheric system based on the best fit sphere - art. no. 68342V

Integration of Metrology in Grinding and Polishing Processes for Rotationally Symmetrical Aspherical Surfaces with Optimized Material Removal Functions

An error compensation method for single point oblique axis grinding considering the grinding wheel wear

Research on Process Technology of Off-Axis Ellipsoid Aspheric Mirror

Design of a six-axis high precision machine tool and its application in machining aspherical optical mirrors

Optimal strategy for fabrication of large aperture aspheric surfaces

Euler’s equation grinding track, microgrinding mechanism, and process research of space optical crystal materials

Establishment and analysis of feasibility evaluation system and ultra-precision manufacturing technology for small aperture free-form surface optical element

Envelope grinding of micro-cylinder array lenses using a near arc-profile wheel without on-machine precision truing

A Method of Restraining the Adverse Effects of Grinding Marks on Small Aperture Aspheric Mirrors