A PZT Actuated 6-DOF Positioning System for Space Optics Alignment

Fangxin Chen,Wei Dong,Miao Yang,Lining Sun,Zhijiang Du
DOI: https://doi.org/10.1109/TMECH.2019.2942645
2019-01-01
IEEE/ASME Transactions on Mechatronics
Abstract:Due to limitations in the fabrication technology, the large aperture space optical mirror is always spliced into several small segments rather than fabricated monolithically. To guarantee the imaging quality of the system, each segment needs to be aligned at micron-level precision with millimeter-level range. For this purpose, a PZT actuated six-axis high-precision positioning system, which consis...
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