Abstract:The PTB built a comparator setup for testing length measuring systems under vacuum conditions. The setup is equipped with a linear stage which is operated in a closed loop using the feedback of a 1.5D encoder system with three encoder heads for length and vertical rotation angle and exhibits a movement range of 150 mm. The main measurement system is a heterodyne interferometer with periodic nonlinearities with amplitudes below 10 pm. The comparator setup was characterized using a mirror mounted on the stage reflecting the measurement as well as the reference beams. By these means, the resolution, the stability of the setup as well as the influence of guiding errors on position-dependent measurement deviations of the fully fiber coupled interferometer were investigated. A position-depending error was observed which was resulting from the variation of the performance of the coupling into the multi-mode fibers used to transfer the superposed beams to the photoreceivers. The measured deviations were 1.5 nm or 0.2 nm over 70 mm travel range depending on the core diameter of the multi-mode fibers of 50 μm and 200 μm, respectively. Three different commercial fiber interferometer systems were analysed under vacuum conditions with the comparator setup. All tested systems are working with light sources with a wavelength of approximately 1535 nm but differ in the amplitude of their periodic nonlinearities in the range between 10 pm and 29 nm. The tests of their resolution and stability were limited by vibrations in the comparator setup and the lack of adequate synchronization capabilities of the data acquisition of these systems.

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