Digital testing of transmitted wavefront distortion for micro-optics

刘重庆,高文彪,吴庆文,白剑,曹天宁
DOI: https://doi.org/10.3321/j.issn:1002-1582.2001.06.028
2001-01-01
Guangxue Jishu/Optical Technique
Abstract:This paper describes the testing of transmitted wavefront distortion for Φ3.6 mm×0.5 mm glass parallel flat using the CQG-II shop digital interferometer manufactured by Zhejiang Univ. The interferometer employs the phase-shift fringe scanning digital analysis with its software running in WINDOWS operating system, so that it can measure the optics with maximum aperture of Φ60 mm, while its wavefront distortion has an accuracy of λ/30. Practical shop testing demonstrates that the sampled points within the clear aperture of Φ3.1 mm reach 4200 when a four times optical enlarge system is inserted in the interferometer. Since the system error of interference cavity is PV≤0.028λ for transmitted testing, the interferometer has the good measuring repeatability of PV≤0.03λ during several days. The interferometer has been available for daily use and the microoptical devices whose quality is ensured by the interferometer have been accepted by the PIONEER Co. in Japan.
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