Fabrication of Pdir-Coated Conductive Atomic Force Microscope Tip and Its Application in Nanofabrication

HF Chen,JQ Song,YC Wang,ZF Liu
DOI: https://doi.org/10.1080/10587259908023439
1999-01-01
Abstract:We report a new,conductive AFM tip, which is fabricated by thermal evaporation of 20-30nm PdIr alloy onto commercial silicon nitride cantilevers. With well-controlled evaporation conditions, a tip with nice electrical conductivity, good mechanical and chemical stabilities has been prepared. Thus fabricated AFM tips were used to measure electrical properties of materials with spatial resolution higher than 2nm, and to fabricate nanostructures on Zn-doped p-type GaAs (100) and chromium surfaces via field-induced oxidation.
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