Abstract:Plasmonic nanoscale devices/structures have gained more attention from researchers due to their promising functions and/or applications. One important technical focus on this rapidly growing optical device technology is how to precisely control and fabricate nanostructures for different functions or applications (i.e., patterning end points should locate at/near the interface while fabricating these plasmonic nanostructures), which needs a systematic methodology for nanoscale machining, patterning, and fabrication when using the versatile nanoprecision tool focused ion beam (FIB), that is, the FIB-assisted interface detection for fabricating functional plasmonic nanostructures. Accordingly, in this work, the FIB-assisted interface detection was proposed and then successfully carried out using the sample-absorbed current as the detection signal, and the real-time patterning depth control for plasmonic structure fabrication was achieved via controlling machining time. Besides, quantitative models for the sample-absorbed currents and the ion beam current were also established. In addition, some nanostructures for localized surface plasmon resonance biosensing applications were developed based on the proposed interface detection methodology for FIB nanofabrication of functional plasmonic nanostructures. It was shown that the achieved methodology can be conveniently used for real-time control and precise fabrication of different functional plasmonic nanostructures with different geometries and dimensions.

Focused ion beam–based nanoimprint stamp for replicating micro/nanostructures under low temperature

Nanoimprint lithography for complex 3D micro-nano structures replication under low temperature

Research on Micro/nanopattern Fabrication Based on Nanoimprint Lithography at Low Temperature

Optimization and experimentation of nanoimprint lithography based on FIB fabricated stamp

Application of Lift-Off Process in Fabricating Nanoimprint Stamp

Development of Novel SU-8 Based Nanoimprint Lithography

Scalable Lithography From Natural Dna Patterns Via Polyacrylamide Gel

Focused-ion-beam stress introducing technology for micro/nano-fabrications

Focused Ion Beam Assisted Interface Detection for Fabricating Functional Plasmonic Nanostructures

Novel method to mass-produce PDMS stamps based on nanoimprint

Large area nanosize array stamp for UV-based nanoimprint lithography fabricated by size reduction process

DNA Nanostructures-Mediated Molecular Imprinting Lithography.

Nanoimprint lithography technology

Nanoimprint Stamp Fabrication for DFB Gratings

UV-based nanoimprinting lithography with a fluorinated flexible stamp

Applications Of Nanoimprint Lithography For Biochemical And Nanophotonic Structures Using Su-8

Anti-sticking Treatment for a Nanoimprint Stamp

Nanostep Fabrication Using FIB Technology

Key Process Study in Nanoimprint Lithography

High fidelity 3D thermal nanoimprint with UV curable polydimethyl siloxane stamps

Method for preparing micro-nano stamping stencil by femtosecond laser preparing