Optical and Ferromagnetic Characteristics of Mn Doped Zno Thin Films Grown by Filtered Cathodic Vacuum Arc Technique

H. K. Liang,S. F. Yu,S. P. Lau,T. S. Herng,S. H. Tsang,L. Wang,J. S. Chen,K. S. Teng
DOI: https://doi.org/10.1016/j.tsf.2010.06.062
2008-01-01
Abstract:Mn doped ZnO (ZnO:Mn) thin films with ~10at.% of Mn were grown on quartz substrates by filtered cathodic vacuum arc (FCVA) technique at low substrate temperature (≤200°C). The influence of substrate temperature and oxygen flow rate on the optical, electrical and magnetic properties of the ZnO:Mn thin films was studied. Both room temperature ferromagnetism and ultraviolet photoluminescence were observed in all films. A maximum saturation moment of 2.9×10−24Am2/Mn can be achieved for the films grown in an optimum condition. This suggests that the fabrication of high-quality ZnO:Mn films by FCVA technique has the potential to realize efficient magneto-optic devices operating at ultraviolet regime.
What problem does this paper attempt to address?