Structural and Photoluminescence Analysis of Mn-doped ZnO Thin Films

CHEN Xiang-cun,KANG Chao-yang,YANG Yuan-jun,XU Peng-shou,PAN Guo-qiang
DOI: https://doi.org/10.3788/fgxb20113212.1247
2011-01-01
Chinese Journal of Luminescence
Abstract:Zn1-xMnxO thin films were successfully grown on Si (111) substrates by pulsed laser deposition(PLD).X-ray diffraction measurement revealed that all the films were single phase and had wurtzite structure with c-axis orientation. As Mn concentration increased in Zn1-xMnxO films, the c-axis lattice constant increased gradually. Atomic Force Microscopy (AFM) showed that surface roughness and morphology changed with doping concentrations. Photoluminescence spectra of Zn1-xMnxO thin films were also studied which shows a narrow UV band at 387 nm, a broad blue band of 430 nm and another broad peak at 545 nm. It was deduced that Mn doping leads to a blue shift of the UV band, and a red shift of 430 nm and 545 nm.
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