Abstract:Aluminum-doped zinc oxide (AZO) is a popular, low-cost, nontoxic material that finds application as a transparent conducting electrode in photonic, sensing, and photovoltaic devices. We report the AZO thin films with a high figure of merit on large-area glass substrates by direct current magnetron sputtering without any intentional substrate heating. Furthermore, a simple thermal post-treatment to improve the transmittance of AZO thin film in the infrared region for its application in low-band-gap devices is presented. High optoelectronic properties are obtained by optimizing oxygen content during the sputtering process. The structural, morphological, optoelectrical, and photoluminescence characterization of cold sputtered AZO films is investigated for its latent applications. AZO thin films with an electrical sheet resistance of 8.8 Ω/□ and a visible light transmittance of 78.5% with thickness uniformity above 95% are achieved on 300 mm × 300 mm glass substrate. The AZO film with optimized process conditions is employed as a transparent electrode to fabricate a copper-indium-gallium-selenide-based thin film solar cell, demonstrating 11.8% power conversion efficiency. The AZO film with optimized sputter conditions was post-treated in ambient conditions with an Al blanket to suppress the resistivity by proper organization of the defects due to Al consumption and point defects, resulting in improved transparency (85%) in the infrared region with a sheet resistance of 40 Ω/□. This has great potential for developing scalable and low-cost AZO thin films for transparent electrodes in a wide range of the spectrum.

High-performance low-temperature transparent conducting aluminum-doped ZnO thin films and applications

Deposition and Characterization of AZO Thin Films on Flexible Glass Substrates Using DC Magnetron Sputtering Technique

Structural ,Electrical ,and Optical Properties of Transparent Conductive Al-Doped ZnO Films Prepared by RF Magnetron Sputtering

Effect of Film Thickness on Properties of Al-Doped Zno Film As Transparent Conducting Electrodes in Oleds

High Performance AZO Thin Films Deposited by RF Magnetron Sputtering at Low Temperature

Transparent Conductive Al-Doped Zno Thin Films Grown at Room Temperature

Highly conductive and transparent Al-doped ZnO films on glass substrate via incorporating hydrogen at low substrate temperatures

Al-doped ZnO Thin Films with Excellent Optoelectronic Properties Prepared Using H 2 -Assisted Reactive Magnetron Sputtering at Low Temperatures for Potential Application in Photovoltaic Devices

Effect of Al-doped on Optics and Electricity of ZnO (ZnO∶Al) Thin Films

Optical and Electrical Properties of Al Doped ZnO Thin Film with Preferred Orientation in Situ Grown at Room Temperature

RF magnetron sputtering processed transparent conductive aluminum doped ZnO thin films with excellent optical and electrical properties

Room-temperature Deposition of Transparent Conducting Al-doped ZnO Films by RF Magnetron Sputtering Method

Preparation of Aluminum Doped Zinc Oxide Films with Low Resistivity and Outstanding Transparency by a Sol–gel Method for Potential Applications in Perovskite Solar Cell

Enhanced Performance in Al-Doped ZnO Based Transparent Flexible Transparent Thin-Film Transistors Due to Oxygen Vacancy in ZnO Film with Zn-Al-O Interfaces Fabricated by Atomic Layer Deposition.

The properties of Al doped ZnO thin films deposited on various substrate materials by RF magnetron sputtering

Preparation of Aluminum Doped Zinc Oxide Films and the Study of Their Microstructure, Electrical and Optical Properties

Optical and Mechanical Properties of Transparent Conductive Al-Doped Zno Films Deposited by the Sputtering Method

Characteristics of Atomic Layer Deposited Transparent Aluminum-Doped Zinc Oxide Thin Films at Low Temperature

Room Temperature Sputtered Aluminum-Doped ZnO Thin Film Transparent Electrode for Application in Solar Cells and for Low-Band-Gap Optoelectronic Devices

Preparation of highly transparent conductive Al-doped ZnO thin films and annealing effects on properties

Microstructure and Optical and Electrical Properties of Al-Doped ZnO Thin Films Prepared by RF Magnetron Sputtering Method