Abstract:We review recent advances in experimental methods for high spatial-resolution and high time-resolution thermometry, and the application of these and related methods for measurements of thermal transport in low-dimensional structures. Scanning thermal microscopy (SThM) achieves lateral resolutions of 50 nm and a measurement bandwidth of 100 kHz; SThM has been used to characterize differences in energy dissipation in single-wall and multi-wall carbon nanotubes. Picosecond thermoreflectance enables ultrahigh time-resolution in thermal diffusion experiments and characterization of heat flow across interfaces between materials; the thermal conductance G of interfaces between dissimilar materials spans a relatively small range, 20 <G <200 MW m(-2) K-1 near room temperature. Scanning thermoreflectance microscopy provides nanosecond time resolution and submicron lateral resolution needed for studies of heat transfer in microelectronic, opto-electronic and micromechanical systems. A fully-micromachined solid immersion lens has been demonstrated and achieves thermal-radiation imaging with lateral resolution at far below the diffraction limit, <2 mum. Microfabricated metal bridges using electrical resistance thermometry and joule heating give precise data for thermal conductivity of single crystal films, multilayer thin films, epitaxial superlattices, polycrystalline films, and interlayer dielectrics. The room temperature thermal conductivity of single crystal films of Si is strongly reduced for layer thickness below 100 nm. The through-thickness thermal conductivity of Si-Ge and GaAs-AlAs superlattices has recently been shown to be smaller than the conductivity of the corresponding alloy. The 3omega method has been recently extended to measurements of anisotropic conduction in polyimide and superlattices. Data for carbon nanotubes measured using micromachined and suspended heaters and thermometers indicate a conductivity near room temperature greater than diamond.

Measurement Methods and Technology of Thin-Film Thermal Conductivity

Measurement Techniques for Thermal Conductivity and Interfacial Thermal Conductance of Bulk and Thin Film Materials

METHOD OF DETERMINATION OF THERMAL CONDUCTIVITY AND EMISSIVITY OF ELECTRONIC THIN FILMS

Thermal Conductivity of Thin Films: Measurements and Understanding

Methods for Measuring the Thermal Diffusivities of Thin Films

Thermal characterization of thin films: A chip-based approach for in-plane property analysis

Measurement of the Thermal Transport Properties of Dielectric Thin Films Using the Micro-Raman Method

Study on Thermal Conductivity Measurement System for Composite Thin Films

In-Plane Thermal Conductivity Of Ultra-Thin Al2o3 Films Measured By Micro-Raman

The thermal contact resistance testing method study of thin film materials

An Improved Thermal Conductivity Measurement Scheme for Macroscopic Graphitic Films Using the Laser Flash Method

Interface thermal conductance and the thermal conductivity of multilayer thin films

Research On Thermal Conductivity Measurement Of Submicrometer-Scale Silicon Dioxide Film In Thermal Flow Sensor By Micro-Raman Technique

Thermometry and Thermal Transport in Micro/Nanoscale Solid-State Devices and Structures

Thermal conductivity measurement of submicrometer-scale silicon dioxide films by an extended micro-Raman method

Technology of Thin-Film Thermistance Microsensor

Quantum Dots Photoluminescence Based Thin Film Thermal Conductivity Metrology

Progress in measurement of thermoelectric properties of micro/nano thermoelectric materials: A critical review

Anisotropic thermal diffusivity measurement of thin films: From a few to hundreds of microns

Simultaneous Measurement of Thermal Conductivity and Volumetric Heat Capacity of Thermal Interface Materials Using Thermoreflectance

A Novel Steady-State Method for Measuring Thermal Conductivity of Thermal Interface Materials with Miniaturized Thermal Test Chips