Discovery of Nanoscale Electric Field‐Induced Phase Transitions in ZrO2
Patrick D. Lomenzo,Liam Collins,Richard Ganser,Bohan Xu,Roberto Guido,Alexei Gruverman,Alfred Kersch,Thomas Mikolajick,Uwe Schroeder
DOI: https://doi.org/10.1002/adfm.202303636
IF: 19
2023-06-09
Advanced Functional Materials
Abstract:Nanoscale electric field‐induced phase transitions in antiferroelectric ZrO2 are imaged using band‐excitation piezoresponse force microscopy. Crystalline grains on the order of 3–20 nm are shown undergoing phase transitions throughout the films. Molecular dynamics simulations reveal that antiferroelectricity and the observed piezoresponse in ZrO2 are due to reversible electric field‐induced phase transitions from the nonpolar tetragonal to polar orthorhombic phase. The emergence of ferroelectric and antiferroelectric properties in the semiconductor industry's most prominent high‐k dielectrics, HfO2 and ZrO2, is leading to technology developments unanticipated a decade ago. Yet the failure to clearly distinguish ferroelectric from antiferroelectric behavior is impeding progress. Band‐excitation piezoresponse force microscopy and molecular dynamics are used to elucidate the nanoscale electric field‐induced phase transitions present in ZrO2‐based antiferroelectrics. Antiferroelectric ZrO2 is clearly distinguished from a closely resembling pinched La‐doped HfO2 ferroelectric. Crystalline grains in the range of 3 – 20 nm are imaged independently undergoing reversible electric field induced phase transitions. The electrically accessible nanoscale phase transitions discovered in this study open up an unprecedented paradigm for the development of new nanoelectronic devices.
materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,nanoscience & nanotechnology