Abstract:Highly optically transparent and electrically conductive Al-doped ZnO (AZO) thin films with varied Al concentrations were synthesized by means of reactive deposition of ZnO host films and in-situ doping of Al by pulsed laser co-ablation of a Zn target and an Al target with the assistance of an oxygen plasma. The optical and electrical properties of AZO films were tailored by the adjustment of Al concentration which was realized by varying the laser fluence on the Al target. The morphology, composition and structure as well as the optical and electrical properties were characterized and the effects of Al doping and post-deposition annealing were investigated. Similar with undoped ZnO, the synthesized AZO films have a hexagonal wurtzite structure with the crystallinity deteriorated, present high visible transparency with the absorption edge blue shifted and show good electrical properties with the electrical conductivity increased. The structural, optical and electrical properties are strongly dependent on Al concentration and are significantly improved after annealing in H2/N2 mixed gas. Annealed AZO films containing 3.0at% Al have optical properties including an absorption edge near 325nm and an optical band gap of 3.67eV and electrical properties covering an electrical resistivity of 5.27 × 10−4Ωcm and a carrier concentration of 1.11 × 1021cm−3 with a Hall mobility of 10.7cm2/V s.

Influence of Thickness of Al-Doped ZnO Films as Broadband Antireflection Coating on Teraherz Transmission

Deposition and Characterization of AZO Thin Films on Flexible Glass Substrates Using DC Magnetron Sputtering Technique

Carrier Concentration Dependence of Terahertz Transmission on Conducting ZnO Films

The Effects of Oxygen Partial Pressure and Substrate Temperature on the Structural and Optical Properties of Zno Films

Effect of the ZnO buffer layer thickness on AZO film properties

Terahertz Transmission Properties of Transparent Conducting Molybdenum-Doped Zno Films

Effect of Film Thickness on Properties of Al-Doped Zno Film As Transparent Conducting Electrodes in Oleds

Highly Transparent Conductive and Near-Infrared Reflective Zno:Al Thin Films

Infrared Properties And Mechanism Of Al-Doped Zno Thin Films

Optical Properties of Al-Doped ZnO Films in the Infrared Region and Their Absorption Applications

Studies on Morphology, Electrical and Optical Characteristics of Al-doped ZnO Thin Films Grown by Atomic Layer Deposition

A Comparative Study of Growth and Properties of Atomic Layer Deposited Transparent Conductive Oxide of Al Doped ZnO Films from Different Al Precursors

Preparation and Characterization of Al-doped ZnO Films and the Properties of the Composite Films with Ferroelectric Films

Transparent conductive and near-infrared reflective Cu-based Al-doped ZnO multilayer films grown by magnetron sputtering at room temperature

Effects of Al Doping on the Properties of ZnO Thin Films Deposited by Atomic Layer Deposition

Highly Near-Infrared Reflecting and Transparent Conducting ZnO : Ga Films: Substrate Temperature Effect

Tailoring of Optical and Electrical Properties of Transparent and Conductive Al-doped ZnO Films by Adjustment of Al Concentration

Characteristics of Atomic Layer Deposited Transparent Aluminum-Doped Zinc Oxide Thin Films at Low Temperature

Study on Al doped ZnO transparent conducting films

Systematic control of carrier concentration and resisitivity in RF sputtered Zinc oxide thin films

Infrared reflective properties of AZO/Ag/AZO trilayers prepared by RF magnetron sputtering