Deposition of ZrC Coating on Cemented Carbide Tools

Li Xiuping,Yu Zhiming,Chen Xiangming
DOI: https://doi.org/10.3969/j.issn.1003-7292.2012.03.001
2012-01-01
Abstract:ZrC coating was deposited on cemented carbide tools by chemical vapor deposition in which Zr was supplied by ZrCl4 gas generated directly from in situ halogenation reaction.The thickness uniformity,deposition rate,microstructure and texture orientation of the ZrC coating deposited and grew on different substrate surface were analyzed by SEM and XRD.The conversion rate of the ZrC coating deposited with the process parameters was quantitatively indicated by the contrast between theoretical calculation and actual process result.It is showed that the thickness of the ZrC coating on the tools located at different position in CVD furnace is uniform and due to the temperature limitation,the deposition rate is low.The actual conversion rate from ZrCl4 gas to ZrC coating under the process parameters is about 11%,which is in the theoretical maximum value range of 14%.With the increase of deposition pressure,the conversion rate is slowly reduced to 10%.The ZrC coating deposited on the cemented carbide surface presents fine particle morphology while that deposited on TiN pre-coating surface on the cemented carbide substrate is typical lamellar structure,and accordingly,the coating texture orientation is changed from(311) crystal plane to(111).
What problem does this paper attempt to address?