SiC Interlayer/diamond Coatings Prepared on Cemented Carbide Micro-Tools by High Current DC Extended Arc Chemical Vapor Deposition

HEI Hong-jun,LI Yi-feng,LIU Yan-qing,TANG Wei-zhong,MA Shi-jie
DOI: https://doi.org/10.3969/j.issn.1001-9731.2013.08.026
2013-01-01
Abstract:High current DC extended arc chemical vapor deposition(HCDCA CVD) technique was used to deposit a SiC coating which was designed as an interlayer for diamond coatings on cemented carbide micro-tools.The result shows that a continuous and compact SiC nanostructured interlayer could be prepared by HCDCA CVD technique,and such a SiC interlayer can restrain effectively the out-diffusion of Co element and ensure good adhesion of diamond coatings to the tools without using the acid etching pretreatment to remove Co from the tools.Cutting experiment results show that there is less chips adherent on the SiC interlayer/diamond coated micro-tools than on the uncoated tools.Moreover,surface of the workpiece machined by the coated micro-tools has fewer burrs than that machined by the uncoated tools.These results indicate that the SiC interlayer/diamond coated micro-tools may exhibit excellent machining ability.
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