Tunable Passive Integrated Circuits Using Bst Thin Films

J Serraiocco,B Acikel,P Hansen,T Taylor,H Xu,JS Speck,RA York
DOI: https://doi.org/10.1080/10584580215481
2002-01-01
Integrated Ferroelectrics
Abstract:Preliminary results from our work on compact phase shifters using BaSrTiO3 thin films are presented. A reflection phase shifter utilizing a lumped element resonator achieved 120degrees phase shift at 10GHz with -3.3dB insertion loss. A synthetic transmission line true time delay phase shifter at 5GHz was able to achieve a phase shift of 60degrees with -1.1dB insertion loss. These results were obtained in a process suitable for integration with conventional passive and hybrid circuit technologies.
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