A P-Channel MOSFET on 4H-SiC

J. S. Han,K. Y. Cheong,Sima Dimitrijev,Michael Laube,Gerhard Pensl
DOI: https://doi.org/10.4028/www.scientific.net/MSF.457-460.1401
2004-01-01
Materials Science Forum
Abstract:4H-SiC based P-channel MOSFET with nitrided gate oxide have been fabricated and analysed. The threshold voltage and the peak channel-carrier mobility, obtained from the transfer characteristic in the linear regime, are -4.8 V and 6 cm(2)/Vs. The drain current for zero gate bias (off current) is extremely low, which opens new application possibilities such as nonvolatile random-access memories.
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