Single-Mask, Flip-Bonded Titanium-On-Glass (Fbtog) Technology For Wafer-Level Batch Fabrication Of Suspended High-Aspect-Ratio Bulk Titanium Microstructures

Y. Zhang,G. Zhao,Q. Shu,Y. Tian,W. Li,J. Chen
DOI: https://doi.org/10.1016/j.proche.2009.07.189
2009-01-01
Abstract:A Flip-Bonded Titanium-On-Glass (FBTOG) technology, which combines titanium Inductively-Coupled-Plasma (ICP) deep etching and adhesive wafer bonding technique, was developed to fabricate suspended in-plane high-aspect-ratio bulk titanium microstructures at wafer level. 25 mu m thick suspended structures with a trench aspect ratio of about 10 are demonstrated. A 2200 mu m-long comb-drive actuated bulk titanium lateral relay showed a contact resistance of 2.3 Omega at a moderate actuation voltage of 30V.
What problem does this paper attempt to address?