Nitrogenated Amorphous Carbon As a Semiconductor

SRP Silva,B Rafferty,GAJ Amaratunga,J Schwan,DF Franceschini,LM Brown
DOI: https://doi.org/10.1016/0925-9635(95)00446-7
IF: 3.806
1996-01-01
Diamond and Related Materials
Abstract:At present, hydrogenated amorphous carbon (a-C:H) is a poor electronic material primarily due to the excessive density of defect states in the band gap which act as trapping centres. The ability of nitrogen to improve the semiconducting properties of a-C:H is examined. A reduction in the activation energy for electronic conduction in nitrogenated a-C:H (a-C:H:N) films and the approximately constant optical band gap with increasing N content suggest that N influences the bulk electronic properties of a-C:H. Electron spin resonance shows a reduction of the density of gap states in a-C:H:N with increasing N content. Electron energy loss spectroscopy shows the films to be predominantly sp2 bonded with band edge properties which change significantly as a function of the N content. The C:H:N contents of the films were determined by elastic recoil detection analysis and Rutherford backscattering.
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