Current-collapse Suppression and Leakage-Current Decrease in AlGaN/GaN HEMT by Sputter-Tan Gate-Dielectric Layer
Bosen Liu,Guohao Yu,Huimin Jia,Jingyuan Zhu,Jiaan Zhou,Yu Li,Bingliang Zhang,Zhongkai Du,Bohan Guo,Lu Wang,Qizhi Huang,Leifeng Jiang,Zhongming Zeng,Zhipeng Wei,Baoshun Zhang
DOI: https://doi.org/10.1088/1674-4926/24010025
2024-01-01
Journal of Semiconductors
Abstract:In this paper,we explore the electrical characteristics of high-electron-mobility transistors (HEMTs) using a TaN/AlGaN/GaN metal insulating semiconductor (MIS) structure. The high-resistance tantalum nitride (TaN) film prepared by magnetron sputtering as the gate dielectric layer of the device achieved an effective reduction of electronic states at the TaN/AlGaN interface,and reducing the gate leakage current of the MIS HEMT,its performance was enhanced. The HEMT exhib-ited a low gate leakage current of 2.15 × 10-7 mA/mm and a breakdown voltage of 1180 V. Furthermore,the MIS HEMT dis-played exceptional operational stability during dynamic tests,with dynamic resistance remaining only 1.39 times even under 400 V stress.