Abstract:Al-doped tetrahedral amorphous carbon (ta-C) films were prepared by filtered cathodic vacuum arc technique. Effect of Al content on the structure and properties of the ta-C film were systematically investigated. Results showed that Al content in films increased from 0 to 39.5 at. % as the Al target current altered from 0 to 2 A. Without Al doping, ta-C film mainly presented amorphous characteristic with disordered arrangement and compact structure. With a small amount of Al doping, the film maintained the amorphous phase structure, and Al atoms mainly existed in the carbon tetrahedral interstitial space in the form of solid solution. At high Al doping content, the formed Al nanoparticles embedded in the carbon matrix network. Meanwhile, the addition of Al could promote the graphitization of films. The residual stress of ta-C films decreased gradually with increase of Al content. Furthermore, the hardness and elastic modulus of films also decreased with increasing Al content. That's ascribed to the reduction of residual stress and graphitization of the carbon structure. In addition, the ta-C film with Al addition could effectively improve the friction and wear properties of films at both room and high temperature. The friction coefficient decreased with the increase of Al content at room temperature (RT). At 400 °C, the film containing 7.6 at. % Al obtained the lowest friction coefficient and wear rate, corresponding to the values of 0.29 and 12.3 × 10 −8 mm 3 /N⋅m, respectively.

Different Substrate Materials Effect on Structure of Ta-C Films by Raman Spectroscopy for Magnetic Recording Sliders

Effect of Ta Underlayer on Perpendicular Anisotropy of TbFeCo Films

Substrate Bias Effect on Structure of Tetrahedral Amorphous Carbon Films by Raman Spectroscopy

Corrosion Protection of Ultra-Thin Ta-C Films for Recording Slider Applications at Varied Substrate Bias

Tribological Properties of Ta‐C‐N and Ta‐N Thin Films

Effect of Substrate Bias on Microstructure and Properties of Tetrahedral Amorphous Carbon Films

Comparative Study of the Tribology of Amorphous Carbon Films Via Magnetron Sputtering Depending on the Different Magnetic Field

Structure and Tribological Properties of Ultra-Thin Tetrahedral Amorphous Carbon (ta-C) Films

Influence of Ion Energy and Substrate Temperature on the Optical and Electronic Properties of Tetrahedral Amorphous Carbon (Ta-C) Films

Effect of substrate rotational speed during deposition on the microstructure, mechanical and tribological properties of a-C:Ta coatings

Structure and Properties of Ta-C Films Deposited by Filtered Cathodic Vacuum Arc Technology As a Function of Substrate Bias

Magnetic Exchange-Coupled Sm(Co,R)/Cr(R = Al, Si, Ti, Nb, Cu) Series Films for Ultrahigh-Density Longitudinal Recording Media

Property Study of Tbfeco for All Optical Magnetic Recording

Preparation and Study of the Tribological Properties of Tetrahedral Amorphous Carbon Film

A Tribological Study of Tetrahedral Amorphous Carbon Films Prepared by Filtered Cathodic Vacuum Arc Technique

Effects of Ta Seed Layer on the Microstructure and Magnetic Property of Ni65co35 Films

Structural, Mechanical and Frictional Properties of Tetrahedral Amorphous Carbon Film by Filtered Cathodic Vacuum Arc System

Manipulate the magnetic properties of AlNiCo films by tuning non-magnetic phase structures

Microstructure evolution and mechanical properties of Al doped ta-C films prepared by filtered cathodic vacuum arc

Co2 FeAl thin films grown on MgO substrates: Correlation between static, dynamic and structural properties

Effect of substrate bias on ta-C films deposited by magnetically enhanced vacuum arc