Theory and Simulation of Accelerometer Based on Laser Trapping

沈瑜,王建中,骆钧炎,胡慧珠

DOI: https://doi.org/10.3969/j.issn.1007-2276.2010.03.034

2010-01-01

Abstract:Non-contact supporting of proof mass is a significant technology to achieve high precision measurement of acceleration. Electrically suspending technology and magnetic suspending technology have been used to implement non-contact supporting of proof mass. In this paper, the laser trapping technology was used to implement non-contact supporting of proof mass, which extremely reduced measurement errors of acceleration by reason of contact mode. Multi beams fiber trap based on microstructure was a kind of trap easily to configure, miniaturize and integrate, so it was an actual scheme to achieve a miniaturized and high precision accelerometer. Measurement model of accelerometer based on dual beams fiber trap was established. The system consisted of trapping and sensing module, micro-displacement measuring module and optical closed-loop module. Operation of the modules was introduced with emphasis on mechanical property of dual beams fiber trap. Using ray optics (RO) method, the axial force of Mie particle in dual beams fiber trap was theoretically analyzed and numerically simulated. The measurement sensitivity of 10-7 g/μm was obtained through parameters optimizing. The results show that the accelerometer based on dual beams fiber trap is capable of high precision.