Abstract:Mechanical behavior of film material in micron and nano scales has gained much consideration as it has been extensively used in microelectronics and Microelectromechanical Systems (MEMS). Many works have been carried out to investigate the mechanical properties of film material by undergoing uniaxial micro-tension testing where the micro-tension setups used by many authors are mainly the uniaxial tension in a unique direction. But when these setups are used under a microscopic system, the micro regions being detected often go beyond the scanning scope during the test. This brings in difficulty to accurately calculate the deformations of the detected regions. In this paper, a delicate setup which can accomplish uniaxial tension in the opposing directions and micro force detection is designed to investigate the in-situ microstructure evolution of specimens under loading. Two identical piezoelectric actuators moving in the opposing direction are used to exert forces on the specimen synchronously controlled by a computer. Two symmetrical double-cantilevered force sensors respectively connected to the two PZT actuators are devised to detect the tensile loads applied on the specimen. The force sensors are calibrated using Electronic Speckle Pattern Interferometry (ESPI). The relative gripping and adjusting units located between the double-cantilevered force sensors are employed to ensure that the specimen is under uniaxial load. The proposed tensile setup can be used under an optical microscopic or an AFM stage for studying the morphology changes and deformations of material on grain scale. The elaboration of the system is presented in the paper and an experiment of polycrystalline aluminum thin film deformations based on grain scale is performed to demonstrate its performance.

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