Current–voltage characteristics of sol–gel derived SrZrO3 thin films for resistive memory applications

Jingxian Wu,Zheng Wen,Di Wu,Haifa Zhai,Aidong Li
DOI: https://doi.org/10.1016/j.jallcom.2010.10.134
IF: 6.2
2011-01-01
Journal of Alloys and Compounds
Abstract:SrZrO3 thin films are prepared on Pt/TiO2/SiO2/Si substrates by sol-gel process for resistive random access memory applications. The unipolar resistive switching characteristic is achieved in both stoichiometric and Zr-deficient SrZrO3 thin films. Formation and rupture of filaments composed of oxygen vacancies are proposed to explain the observed resistive switching behaviors. By introducing oxygen vacancies into SrZrO3 through making the film Zr-deficient, the conduction mechanism of the high resistance state changes from Ohmic to space charge limited behavior. This may be ascribed to more deep traps associated with oxygen vacancies due to Zr-deficiency. Switching endurance is enhanced significantly in Zr-deficient SrZrO3 due to the reduced Joule heating. (C) 2010 Elsevier B.V. All rights reserved.
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