Orientation Control of Chemical Solution Deposited Lanio3 Thin Films

K Ueno,T Yamaguchi,W Sakamoto,T Yogo,K Kikuta,S Hirano
DOI: https://doi.org/10.1016/j.tsf.2005.05.032
IF: 2.1
2005-01-01
Thin Solid Films
Abstract:High quality LaNiO3 (LNO) thin films with preferred orientation could be synthesized on Pt/Ti/SiO2/Si substrates at 700 °C using the chemical solution deposition method. The homogeneous and stable LNO precursor solutions were prepared using lanthanum isopropoxide and nickel (II) acetylacetonate in a mixed solvent of absolute ethanol and 2-methoxyethanol. The oriented LNO thin films exhibit metallic electro-conduction, and their resistivity at room temperature is sufficiently low for making them an alternative electrode material for functional ceramic thin films.
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