Preparation of Conducting Films with High Performance

ZHANG Shu-ren,CHEN Guo-liang,GUO tai-liang
DOI: https://doi.org/10.3969/j.issn.1002-0322.2007.03.007
2007-01-01
Abstract:Cr-Cu-Al-Cr films have been grown on glass substrate by magnetron sputtering.The adhesion of the films has been tested by welding method.The films were characterized by x-ray diffraction(XRD),atomic force microscopy(AFM) and surface profilometer.The way was found to improve the oxidation resistance of the films when the films were deposited and in high temperature circumstance.The relation between the grain size and the electrical properties was also analyzed.
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