Diamond thin film/berillia and its thermal conductivity

FANG Mei,YU Zhi-ming,XIAO Zhu,CHEN Shuang,CHEN Yong-qin
2009-01-01
Abstract:In order to improve the thermal conductivity of berillia substrates, diamond films were deposited on its surface by means of hot-filament chemical vapor deposition(HFCVD). The surface structures and morphologies were investigated by scanning electron microscopy(SEM) and atomic force microscopy(AFM), while the components and the thermal conductivities were detected by X-ray diffraction(XRD) and laser-diathermometer respectively. The results show that diamond films have improved the conductivites of berillia by 12.1%~34.4% resulting from different BeO pre-treatments and the combination modes of diamond /BeO.
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