Abstract:Al-doped ZnO films were grown by reactive electron beam evaporation with ceramic targets,(ZnO)_(1-x)(Al_2O_3)_x(x=w(Al_2O_3)=0, 0.01,0.02,0.05),as source materials.The structural and electrical properties of Al-doped ZnO films were characterized by X-ray diffraction,Raman scattering and Hall investigations.The results showed that Al-doped ZnO films grown from(ZnO)_(1-x)(Al_2O_3)_x(x≤0.02) targets were still highly c-axis oriented,although the degree of c-axis orientation was somewhat degenerated along with further increase of Al content in the films.Raman scattering measurements indicated that the internal stress in Al-doped ZnO films increased along with the increase of Al content in the films and reached saturation in the case of x = 0.02.The actual atomic Al content in the films grown using(ZnO)_(0.98)(Al_2O_3)_(0.02) target was 6%,which was normalized with the Zn content in the film.The resistivity of Al-doped ZnO films first decreased with the increase of Al content in the film and reached a minimum of 7.85×10~(-4) Ω·cm at x=(0.02,) then increased with further increase of Al content in the film.The nature of the minimum resistivity of Al-doped ZnO films grown using(ZnO)_(0.98)(Al_2O_3)_(0.02) target was ascribed to the high electron density(1.32×10~(21) cm~(-3)) as well as its high electron mobility of 6.02 cm~2/(V·s).

Study of Microstructure and Interfacial Interaction of AlC60 Co-Evaporated Films

Studies of C-60 Films Deposited Using Ionized Cluster Beam Deposition Technique

Preparation of Rb3C60 Single Crystal Film and Stability of Rb3C60/C60 Interface

Microstructure and Electrical Properties of Al-doped ZnO Thin Films

Experimental study of scaling properties and roughing mechanisms in C 60 -Ag thin films

Synthesis and Characterization of Ag–C60 Nanostructure Film

Structural Study On C-60 Material

Epitaxial thin films of C70: Growth and structure characterization

Observation Of The Development Of The Electronic-Structure Of C(60) Films From Submonolayer Coverage To 2 And 3 Dimensionality

Synchrotron Radiation Photoemission Spectrum Study on K_3C_(60) Film

Structural and Electronic Studies of C60 Films Deposited Using a New Technique of Neutral Cluster Beam Deposition

Growth Mechanism and Microstructure of Al Films Deposited on Ionic Liquid Surfaces

Investigation of the Interaction of Evaporated Aluminum with Vapor Deposited Teflon AF Films Via X-ray Photoelectron Spectroscopy

STUDY ON GROWTH OF C 60 MOLECULES ON GaAs(001) SUBSTRATE BY SCANNING TUNNELING MICROSCOPY

Electron-Microscopy Study of C60

Interfacial Modulation On Single-Crystalline Aluminum Films Grown On Gaas By Eras Insertion

Atomic Structure and Bonding of Epitaxial CU Films on (1120) A-Al203

Study of Microstructure and Anomalous Variation of Resistivity in Metal-C-60 Multilayer Thin-Films

A Study of Waveguide Raman Scattering of C-60 Solid Film.

Evaporated CuAl Amorphous Alloys and Their Phase Transition

Growth And Structure Of C(60) Thin-Films On Nacl, Glass And Mica Substrates