Abstract:Hydrophone is an important part of sonar system and convert acoustic signal into electrical signal. However, the electrical signal generated by the hydrophone is relatively weak and cannot be directly used for underwater detection and communication. Therefore, it is necessary to preprocess the generated electrical signal. In this paper, a switched capacitor charge-sensitive amplifier for MEMS piezoelectric hydrophone is designed. In the structure, two single-channel charge amplifiers are used for time-division multiplexing. The noise sampling and charge amplification are performed separately in the same half cycle to achieve the effect of alternating output, thereby increasing the sampling rate and solving the problem of discontinuous output of the switched capacitor circuit. In the circuit design, virtual switch and two-phase non-overlapping clock are adopted to reduce the error caused by charge injection and clock feedthrough effect of CMOS switch. What's more, the correlated double sampling technique is used to reduce the offset and low frequency noise of the circuit. The gain of the charge-sensitive amplifier designed in this study is 26 dB, the bandwidth is 0.8Hz∼17.6kHz, the equivalent input noise power spectral density is 115.6 n V / H z at 0.1Hz, and the charge sensitivity is 2 mV / pC. The fitting line between the input charge and the amplitude of the output curve is similar to the theory. The simulation results show that the charge-sensitive amplifier proposed in this study meets the design requirements of the MEMS piezoelectric hydrophone readout circuit.

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