Optical Properties of Zinc-Oxide Films Determined Using Spectroscopic Ellipsometry with Various Dispersion Models
Zhong-Hong Dai,Rong-Jun Zhang,Jie Shao,Yi-Ming Chen,Yu-Xiang Zheng,Jia-Da Wu,Liang-Yao Chen
DOI: https://doi.org/10.3938/jkps.55.1227
2009-01-01
Journal of the Korean Physical Society
Abstract:In this work, we have studied the optical properties of wurtizite zinc-oxide films grown on silicon (100) substrates by means of pulsed laser deposition (PLD). Spectroscopic ellipsometry and three dispersion models, namely, the Sellmeier, Cauchy, and Forouhi-Bloomer models, were applied for determining the optical constants of the ZnO thin films. A comparison was made between two samples that were deposited for 30 minutes (sample I) and 60 minutes (sample II), respectively. X-ray diffraction analysis indicates that there are two types of preferred-orientation, i.e., (101) and (100) orientations for sample I and II, respectively. Results show that the Cauchy model gives the best fit for the samples with least root mean square error (RMSE) whereas the Forouhi-Bloomer model is most suitable for the data analysis in both the transparent and the absorption regions. The optical properties extracted from different dispersion models have been compared with the data reported in the literature. The results given in this work show that different dispersion models should be applied to obtain the optical constants for ZnO film samples grown under conditions, to have different types of preferred-orientations.