Research on heat pipe and the variable condition control in semiconductor freezer

Xie Wanrong,Qu Zongchang,Liu Gongyan,Liu Yindi,Wang Guihong
DOI: https://doi.org/10.3969/j.issn.1001-7100.2013.05.017
2013-01-01
Abstract:Cooling mode on separate heat exchange of heat pipe and working parameter of semiconductor coolling wafer application in semiconductor freezer were expatiated,that is controlled by working condition,the control on unsteady-stage conditions of the semiconductor freezer and manufacture were discussed.The experimental results show that refrigeration efficiency of the semiconductor freezer is highly and its energy saving is achieved.
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