Sol-Gel Derived Titania/γ-Glycidoxypropyltrimethoxysilane and Methyltrimethoxysilane Hybrid Materials for Optical Waveguides

Wenxiu Que,X. Hu

DOI: https://doi.org/10.1023/A:1027470214281

2003-01-01

Journal of Sol-Gel Science and Technology

Abstract:We report here on titania/organically modified silane hybrid materials produced by the sol-gel technique for optical waveguide applications. Acid catalyzed solutions of γ-glycidoxypropyltrimethoxysilane and methyltrimethoxysilane mixed with tetrapropylorthotitanate have been used as precursors for the hybrid materials. Waveguide films with a thickness about 1.3-μm have been prepared on a silicon substrate by a single-coating process and low-temperature heat treatment. Atomic force microscopy (AFM), thermal gravimetric analysis (TGA), UV-visible spectroscopy (UV-VIS), and Fourier transform infrared (FTIR) spectroscopy have been used to investigate the optical and structural properties of these waveguide films. The results have shown that dense, pore-free, and highly transparent films can be obtained by low temperature heat treatment. The planar waveguide propagation loss of the hybrid films has also been measured.