Direct Writing of Buried Waveguides in Hybrid Organic-Inorganic Sol-Gel by Femtosecond Laser Pulses

D. K. Y. Low,Xiao Zhang,Hong Xie,Zhongli Li,Gwon Lim,Santosh Pani,Chee Cheong Wong
DOI: https://doi.org/10.2351/1.5060543
2005-01-01
Abstract:Using 775 nm femtosecond laser pulses, buried waveguides were directly fabricated inside hybrid organic-inorganic sol-gel film (70 µm thick), comprising methacryloxypropyltrimethoxysilane and zirconia. Waveguides with typical cross-sectional dimensions of ∼7×10 µm2 were produced. A refractive index increment of ∼2 × 10−3 was measured. Using Fourier Transform InfraRed spectroscopy and scanning electron microscopy, the increase in refractive index was attributed to localized densification of the hybrid sol-gel initiated by the femtosecond laser pulses. The fabrication of a multi-layer 3×3 stacked waveguides was also demonstrated.
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