Abstract:Using the complex image method (CIM), we have analyzed the frequency and temperature dependencies of substrate eddy currents for single-ended and differential spiral inductors on a lossy silicon substrate. From our analysis, we have derived a set of accurate closed-form expressions for calculating inductances and substrate losses due to substrate eddy currents. Here, we propose a frequency-dependent eleven-element equivalent circuit model based on these formulas. We established the validity of the model by comparing the simulated and measured results, which are in good agreement. Index Terms—Complex image method (CIM), differential inductor, eddy currents, greenhouse algorithm, inductor model. HE high operating frequencies, at which deep submicrom- eter and nano-scale CMOS devices are able to operate, have brought radio-frequency integrated circuits (RFICs) in the realm of CMOS making the quality factor of the on-chip spiral inductors a focus of intense research. The quality factor of the on-chip inductor is limited by the losses due to the finite conduc- tivity of the metal and the conducting silicon substrate. Non-per- fect metal wires used to form spiral inductors cause ohmic loss due to the non-zero resistance at low frequencies. Additionally the non-uniform current distribution in metal wires at high fre- quencies increases the losses and degrades the quality factor of inductors. This loss mechanism has been extensively studied as skin- and proximity-effect (1)-(12).

An Equivalent Circuit Model for On-chip Inductors with Gradual Changed Structure.

A Compact Circuit Model of On-Chip Multi-layer Spiral Inductors on Silicon Substrate

Stacked Spiral Inductor Design and Modeling for Fully-Integrated DC-DC Converters

Compact Equivalent Circuit Model Of Two-Layer Spiral Inductors

A derived circuit model for spiral inductors on lossy silicon substrate

Modelling On-Chip Circular Double-Spiral Stacked Inductors for RFICs

A Novel Compact Model for On-Chip Vertically-Coiled Spiral Inductors

Model Description and Parameter Extraction of On-Chip Spiral Inductors for MMICs

A Physics-Aware Methodology for Equivalent Circuit Model Extraction of TSV-inductors

Asic Design of an Integrable Simulated Inductor with Huge Inductance

Experimental Characterisation Of On-Chip Octagonal Double-Helix Inductors On Silicon Substrates

Analysis of Frequency- and Temperature-Dependent Substrate Eddy Currents in On-Chip Spiral Inductors Using the Complex Image Method

A Scalable Model of On-chip Inductor Including Tunable Dummy Metal Density Factor

Vertical Topologies of Miniature Multispiral Stacked Inductors

An improved equivalent circuit model for predicting the transmission characteristics of spiral inductors on GaAs substrates

Accurate Model for Micromachined Microwave Planar Spiral Inductors

Quasi-Static Derived Physically Expressive Circuit Model for Lossy Integrated RF Passives

A Wideband Predictive “Double-$\Pi$ ” Equivalent-Circuit Model for On-Chip Spiral Inductors

Wide-Band Modeling On-Chip Spiral Inductors Using Frequency-Dependent Conformal ADI-FDTD Method

Frequency-Independent Asymmetric Double-Pi Equivalent Circuit For On-Chip Spiral Inductors: Physics-Based Modeling And Parameter Extraction

Double-π Fully Scalable Model for On-Chip Spiral Inductors