Ultraviolet Light Emissions From N-2 Microplasma Electrically Induced By Metal-Insulator-Semiconductor Devices

Peiliang Chen,Xiangyang Ma,Yuanyuan Zhang,Deren Yang
DOI: https://doi.org/10.1016/j.jlumin.2010.01.027
IF: 3.6
2010-01-01
Journal of Luminescence
Abstract:Various metal-insulator-semiconductor (MIS) devices in the form of Au/SiOx(x < 2)/Si, Au/AlOy(y < 1.5)/Si, Au/SiOx/ZnO and Au/AlOy/ZnO have been fabricated. For each device, once a sufficiently high positive voltage is applied on the Au electrode, the same ultraviolet (UV) emission with a spectrum featuring several specific peaks is detected. Interestingly, such UV emissions related to the MIS devices originate from the external N-2 microplasma. It is believed that at the high enough positive voltages the highly energetic electrons emitted out of the Au electrode activate the air to generate the N-2 microplasma. (C) 2010 Elsevier B.V. All rights reserved.
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