Transport properties of proton-irradiated GaAs/AlGaAs two-dimensional electron gas structures

Qin Wang,H.Q. Xu,P. Omling,C. Yang,K.G. Malmqvist
DOI: https://doi.org/10.1016/S0168-583X(99)00549-2
2000-01-01
Abstract:Transport properties of proton-irradiated, GaAs/AlGaAs two-dimensional electron gas structures are investigated. The resistance, the carrier concentration and the quantum life time are strongly influenced by the proton irradiation. For low proton doses, < 5 x 10(11) p(+)/cm(2), the carrier concentration is not influenced, while the resistance increases and the quantum life time decreases. For higher doses, the carrier concentration also decreases, and for doses > 5 x 10(12) p(+)/cm(2) the samples become insulating. It is also found that the transport properties are recovered after the samples are annealed at 500 degrees C for 2 min. (C) 2000 Elsevier Science B.V. All rights reserved.
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