Analysis of the Field Electron Energy Distribution from Amorphous Carbon-Nitride Film

J Chen,NY Huang,XW Liu,SZ Deng,NS Xu
DOI: https://doi.org/10.1109/ivmc.2001.939751
2003-01-01
Abstract:The study of field-electron energy distribution (FEED) from amorphous carbon-nitride (a-CN) films is essential to understanding the mechanism of field emission from this promising material. In this work, the FEED from an a-CN film was obtained by measuring the distribution of electrons field-emitted from individual emitting sites. The FEED are recorded at different electrical fields. We found that the peak shifts as well as the half-widths increase with increasing applied fields. Furthermore, multipeak features are observed at the low-energy side of the spectra. The FEED data are fitted by using a theoretical energy distribution of free-electron approximation. We assumed that the small peaks originate from the interband states of a-CN film. We propose that although the emission mainly originates from current injection into the conduction band of a-CN film, the electrons may also be emitted from interband states.
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