Rf Magnetron Sputtering Condition Dependences Of Dielectric Non-Linearity Of Ba0.6sr0.4tio3 Thin Films

Hongwei Chen,Chuanren Yang,Chunlin Fu,Jihua Zhang,Shucheng Feng,Yafang Pei

DOI: https://doi.org/10.1080/10584580701320388

2007-01-01

Integrated Ferroelectrics

Abstract:Barium strontium titanate ( Ba0.6Sr0.4TiO3, short for BST) thin films were prepared by RF-magnetron sputtering. The influences of deposition conditions, such as sputtering power, deposition pressure and sputtering gas, on the microstructures and dielectric non-linearity of BST thin films were investigated. The results show that both dielectric constant and tunability of BST films increase and then decrease as the sputtering power increases. Moreover, the tunability increases as O-2:Ar ratio increases from 1:1 to 8:1. Not only the ratios of ( Ba+Sr)/Ti and Ba/Sr but also the RMS roughness increases with increasing deposition pressure.