Abstract:Epitaxial compositionally graded (Ba 1-x Sr x )TiO 3 (BST) (0.0≤x≤0.25) thin films were deposited on (100) LaAlO 3 substrates by pulsed laser ablation, the substrates having bottom electrodes made of 100-nm-thick conductive La 0.5 Sr 0.5 CoO 3 (LSCO). Extensive X-ray diffraction, rocking-curve, and φ-scan studies indicate that the graded films are (100)-oriented and exhibit good in-plane relationships of [010] BST //[010] LAO and [001] BST //[001] LAO . For the up-graded films with barium concentration (1-x) increasing across the film thickness in the direction from the film/substrate interface to the film surface, the full width at half maximum of the BST film (200) rocking curve and the surface roughness, examined by atomic force microscopy, were larger than those of the down-graded films with barium concentration decreasing from the film/substrate interface to the film surface. The dielectric properties of the graded films, measured using vertical structures, show that at room temperature, the dielectric constant (ε r ) and dissipation factor (cosδ) at 100 kHz were 380 and 0.013 for the up-graded films, and 650 and 0.010 for the down-graded films, respectively. The dielectric behavior was enhanced in the down-graded films, which was attributed to the fact that the pure BaTiO 3 layer in the down-graded BST films not only serves as a bottom layer but also acts as an excellent seeding layer for enhancing subsequent film growth, leading to better film crystallinity and larger grain sizes in the down-graded films. The graded BST films undergo a diffuse phase transition, giving a broad, flat capacitance-versus-temperature profile. With such a graded structure, it is possible to build a dielectric thin-film capacitor having a capacitance which has a low temperature dependence over a broad temperature regime.

Structural, Dielectric, and Insulating Properties of Barium Strontium Titanate Thin Films Grown on Various Oriented Laalo3 Substrates

Crystallographic Orientation Dependence of Dielectric Response in Lead Strontium Titanate Thin Films

Atomic Structure of Ba0.5sr0.5tio3 Thin Films on Laalo3

Effect of Sputtering-Target Composition on the Structure, Dielectric, Ferroelectric, and Energy Storage Properties of Highly (00L)-Oriented Ba(ZrxTi1–x)O3 Films

Manipulation of phase transitions and electrical properties of Ba<sub>1-x</sub>Sr<sub>x</sub>TiO<sub>3</sub> thin films through orientation engineering

The Structure and Properties of Barium Strontium Titanate Films Prepared by Medium Frequency Magnetron Sputtering

High tunabilty Ba 0.6 Sr 0.4 TiO 3 thin films fabricated on Pt–Si substrates with La 0.5 Sr 0.5 CoO 3 buffer layer

Epitaxial Growth and Electrical Properties of Ba 0.6 Sr 0.4 TiO 3 Thin Films with Conductive La 0.5 Sr 0.5 CoO 3 Bottom Electrodes

Pulsed Laser Deposition of LaAlO3-Ba0.5Sr0.5TiO3 Thin Films for Tunable Device Applications

Microstructure and Enhanced In-Plane Ferroelectricity of Ba0.7sr0.3tio3 Thin Films Grown on Mgal2o4 (001) Single-Crystal Substrate

Preparation and characterizations of Ba(Zr,Ti)O3/(Ba,Sr)TiO3 heterostructures grown on (LaAlO3)0.3(Sr2AlTaO6)0.35 single crystal substrates by pulsed laser deposition

Study on Compositionally Graded Epitaxial Barium Strontium Titanate Thin Films Derived from Pulsed Laser Deposition

Preparation of epitaxial compositionally graded (Ba 1-x Sr x )TiO 3 thin films with enhanced dielectric properties

Fabrication and characterization of epitaxial Ba<sub>0.6</sub>Sr<sub>0.4</sub>TiO<sub>3</sub>/LaNiO<sub>3 </sub>heterostructures

Structural and Optical Properties of BaxSr1−xTiO3 Thin Films on Indium Tin Oxide/quartz Substrates Prepared by Radio-Frequency Magnetron Sputtering

Microstructures and ferroelectric properties of Ba0.6Sr0.4TiO3 thin films

Structure and Properties of Bst/Bzt/Bst Multilayer Film

The influence of post-annealing on the chemical structures and dielectric properties of the surface layer of Ba<sub>0.6</sub>Sr<sub>0.4</sub>TiO<sub>3</sub> films

Structure and Ferroelectric Properties of Barium Titanate Films Synthesized by Sol–gel Method

Microstructure of Compositionally-Graded (ba1−xsrx)tio3 Thin Films Epitaxially Grown on La0.5Sr0.5CoO3-covered (100) LaAlO3 Substrates by Pulsed Laser Deposition

Effects of Ba2+/Sr2+ Ratio on the Microstructure, Dielectric and Ferroelectric Properties of Ba X Sr(1−x)TiO3 Films Prepared by Micro-Arc Oxidation