Filtering performance improvement in V-doped ZnO/diamond surface acoustic wave filters

J. T. Luo,F. Zeng,F. Pan,H. F. Li,J. B. Niu,R. Jia,M. Liu
DOI: https://doi.org/10.1016/j.apsusc.2009.11.077
IF: 6.7
2010-01-01
Applied Surface Science
Abstract:High-frequency surface acoustic wave (SAW) filters using undoped and V-doped ZnO films were fabricated on diamond. Compared with their counterparts, the SAW filters using V-doped ZnO films have higher electromechanical coupling coefficient of ∼2.9% and lower insertion loss. The filtering performance improvement is considered to be due to the ferroelectricity in V-doped ZnO films and the resultant high piezoresponse (∼110pm/V), which is one order of magnitude larger than that of undoped ZnO films. In addition, more perfect (002) preferred orientation, better uniform grains and smoother surface of V-doped ZnO films also contribute to the filtering performance improvement.
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