Effects of Mn‐doping on Surface Acoustic Wave Properties of ZnO Films

J. T. Luo,P. Fan,F. Pan,F. Zeng,D. P. Zhang,Z. H. Zheng,G. X. Liang,X. M. Cai
DOI: https://doi.org/10.1002/pssr.201206381
2012-01-01
Abstract:Surface acoustic wave (SAW) filters based on Mn-doped ZnO films have been fabricated and effects of Mn-doping on SAW properties are investigated. It is found that the electromechanical coupling coefficient (K-2) of Zn0.913Mn0.087O films is 0.73 +/- 0.02%, which is 73.8% larger than that of undoped ZnO films (0.42 +/- 0.02%). Zn0.913Mn0.087O film filters also exhibit a lower absolute value of insertion loss (|IL|) of 16.1 dB and larger bandwidth (BW) of 5.9 MHz compared with that of undoped ZnO film filter. However, Zn0.952Mn0.048O film filters exhibit a smaller K-2 of 0.34 +/- 0.02%, larger |IL| of 26.9 dB and smaller BW of 3.5 MHz. It is suggested that the SAW properties can be improved by appropriate Mn-doping and MnZnO/Si multilayer structure with large d33 is promising for wide-band and low-loss SAW applications. (c) 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
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