Review of Research on Macromodel for MEMS System-level Simulation

关乐,褚金奎,齐东周,王晓东,王立鼎
2009-01-01
Abstract:Most of typical MEMS are composed of functional devices restraint in multiple energy domains and integrate sensing or testing circuit units for signal processing.The method based on macromodel to simulate static and dynamic behavior characteristic of MEMS has become a famous research field.Macromodeling methods were reviewed and summarized for MEMS devices especially referred to two strategies:the superposition of basic function based on Galerkin method and the matrix subspace projection based on finite element equations.The advantages and disadvantages of each implementation were analyzed and then some selection principle was proposed when utilizing them.The main difficulties of system-level simulation were discussed and finally the development direction for macromodeling was indicated.
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