Integrated Microelectromechanical Gyroscopes

Hk Xie,Gk Fedder
DOI: https://doi.org/10.1061/(ASCE)0893-1321(2003)16:2(65)
IF: 2.242
2003-01-01
Journal of Aerospace Engineering
Abstract:Microelectromechanical (MEMS) gyroscopes have wide-ranging applications including automotive and consumer electronics markets. Among them, complementary metal-oxide semiconductor-compatible MEMS gyroscopes enable integration of signal conditioning circuitry, multiaxis integration, small size, and low cost. This paper reviews various designs and fabrication processes for integrated MEMS gyroscopes and compares their performance. Operational principles and design issues of MEMS vibratory gyroscopes are also addressed.
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